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NanoDAC - A new Technique for Deformation Measurement from Micro to Nano Scale

NanoDAC is a new approach for displacement and in-plane strain field measurement based on scanning probe microscopy images (nanoDAC, nano Deformation Analysis by Correlation). In-situ atomic force microscopy scans are carried out at the surface of objects subjected to different thermo-mechanical load states. Locally applied correlation algorithms are used to track image patterns and to obtain incremental displacement values.

The results of the nanoDAC technique are in-plane displacement fields ux(x,y) and uy(x,y). The figure above illustrates the measured displacement field at a crack tip of a thermoset polymer. The crack opening field is shown as contour lines of equal displacement in y-direction and the scanned surface is shown in the background of the image.

Applications of nanoDAC are thermo-mechanical reliability studies of MEMS and NEMS and the mechanical qualification of newly developed nanomaterials for electronic packaging.

Further application areas are focused on:

  • Micro- and nanoscale in-situ deformation measurements.
  • Verification of nanomechanical approaches.
  • Fracture properties of micro- and nanomaterials.
  • Measurement of coefficient of thermal expansion (CTE).
  • Tracking of nanomanipulated objects.
  • Interface Problems of ultrathin layers

Your contact for further information:
Prof. Dr. Bernd Michel
Micro Materials Center Chemnitz
Otto-Schmerbach-Strasse 19
09117 Chemnitz
fon: +49 - 371 - 866 2020
fax: +49 - 371 - 866 2021




©  Nano-CC-UFF 2010 Contact:
Office of Center of Competence "Ultrathin Functional Films"
at Fraunhofer IWS Dresden
Dr. Ralf Jäckel
Phone +49 (0) 351 / 83391 - 3444, Fax +49 (0) 351 / 83391 - 3300